Sputtered titanium carbide thick film for high areal energy on chip carbon based micro-supercapacitors

M. Létiche, K. Brousse, A. Demortière, P. Huang, B. Daffos, S. Pinaud, M. Respaud, B. Chaudret, A. Roussel, L. Buchaillot, P.–L. Taberna, P. Simon and C. Lethien, Advanced Functionnal Materials , 2017, 1606813.


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